MEMS - Recent Developments, Future Directions
نویسندگان
چکیده
This report deals with the field of micro-electromechanical systems, or MEMS. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and/or systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with microand even nanometer accuracies. The products range in size from a few micrometers to millimetres. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale.
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